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Development of a low angle forward reflected neutral oxygen beam for materials processing

✍ Scribed by D.H. Lee; J.W. Bae; S.D. Park; G.Y. Yeom

Book ID: 117226618
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 342 KB
Volume: 398-399
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(01)01370-0

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