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Developing improved units and methods of dust discharge

✍ Scribed by A. M. Kasimov; E. S. Makarenko; A. E. Gorbonosov


Publisher
Springer US
Year
1991
Tongue
English
Weight
350 KB
Volume
32
Category
Article
ISSN
1573-9139

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## Abstract In this paper hydrodynamic and kinetic approaches to model low pressure capacitively coupled radio‐frequency discharges are discussed. In particular approaches and results for power modulated discharges in a mixture of silane and hydrogen and for discharges containing a considerable amo