✦ LIBER ✦
Hydrodynamic and Kinetic Modelling of Dust Free and Dusty Radio-Frequency Discharges
✍ Scribed by W. J. Goedheer; M. R. Akdim; Yu. I. Chutov
- Publisher
- John Wiley and Sons
- Year
- 2004
- Tongue
- English
- Weight
- 439 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0005-8025
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✦ Synopsis
Abstract
In this paper hydrodynamic and kinetic approaches to model low pressure capacitively coupled radio‐frequency discharges are discussed. In particular approaches and results for power modulated discharges in a mixture of silane and hydrogen and for discharges containing a considerable amount of dust particles will be presented. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)