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Developing a neural network-based run-to-run process controller for chemical-mechanical planarization

✍ Scribed by Gou-Jen Wang; Cheng-Hsiong Yu

Publisher: Springer
Year: 2006
Tongue: English
Weight: 963 KB
Volume: 28
Category: Article
ISSN: 0268-3768
DOI: 10.1007/s00170-004-2451-6

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