A neural-Taguchi-based quasi time-optimization control strategy for chemical-mechanical polishing processes

✍ Scribed by G.-J. Wang; M.-H. Chou

• Publisher: Springer
• Year: 2005
• Tongue: English
• Weight: 291 KB
• Volume: 26
• Category: Article
• ISSN: 0268-3768
• DOI: 10.1007/s00170-003-1859-8