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Determining the electron temperature in inductively coupled nitrogen plasmas by optical emission spectroscopy with molecular kinetic effects

✍ Scribed by Zhu, Xi-Ming; Pu, Yi-Kang


Book ID
120653247
Publisher
American Institute of Physics
Year
2005
Tongue
English
Weight
301 KB
Volume
12
Category
Article
ISSN
1070-664X

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