Determination of the sticking coefficient of disilane on Si(001) using the first reflection high energy electron diffraction oscillation period

✍ Scribed by K. Werner; S. Butzke; S. Radelaar; P. Balk

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 496 KB
• Volume: 136
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)90433-2