Determination of the semiconductor doping profile right up to its surface using the MIS capacitor

✍ Scribed by K. Ziegler; E. Klausmann; S. Kar

• Publisher: Elsevier Science
• Year: 1975
• Tongue: English
• Weight: 837 KB
• Volume: 18
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(75)90102-1