Determination of the semiconductor doping profile right up to its surface using the MIS capacitor : K. Ziegler, E. Klausmann and S. Kar. Solid State Electronics, 18, 189 (1975)

• Publisher: Elsevier Science
• Year: 1975
• Tongue: English
• Weight: 124 KB
• Volume: 14
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(75)90651-4