Determination of the oxygen precipitate-free zone width in silicon wafers from surface photovoltage measurements

✍ Scribed by Terry I. Chappell; Patrick W. Chye; Morton A. Tavel

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 354 KB
• Volume: 26
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(83)90158-2