Determination of the optical properties of silicon/silica surfaces by means of ellipsometry, using different ambient media

✍ Scribed by Landgren, Mikael; Joensson, Bengt

• Book ID: 118060871
• Publisher: American Chemical Society
• Year: 1993
• Tongue: English
• Weight: 638 KB
• Volume: 97
• Category: Article
• ISSN: 0022-3654
• DOI: 10.1021/j100110a030