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Determination of the optical constants and thickness profile of a tapered Inconel film by reflection ellipsometry

โœ Scribed by T.F. Thonn; R.M.A. Azzam

Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
355 KB
Volume
127
Category
Article
ISSN
0040-6090

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The conventional ellipsometry can be applied to determine the optical properties of anisotropic materials only if the measurements are made for in-plane uniaxial anisotropy of the bulk sample with the optic axis parallel or perpendicular to the plane of incidence. For arbitrarily oriented anisotropi