Determination of the infrared proportionality coefficient of the CHn stretching mode for a-C:H and a-SiC:H films using ERD methods

✍ Scribed by M. Tanaka; Y. Iwata; F. Fujimoto; K. Komaki; K. Kobayashi; H. Yamashita; M. Haba

• Book ID: 113281227
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 424 KB
• Volume: 45
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(90)90822-c