Determination of the implantation-dose in silicon wafers by x-ray fluorescence analysis

✍ Scribed by Klockenkaemper, Reinhold.; Becker, Maria.; Bubert, Henning.; Burba, Peter.; Palmetshofer, Leopold.

• Book ID: 126068043
• Publisher: American Chemical Society
• Year: 1990
• Tongue: English
• Weight: 416 KB
• Volume: 62
• Category: Article
• ISSN: 0003-2700
• DOI: 10.1021/ac00214a028