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Determination of the equivalent circuit of inductively coupled plasma sources

✍ Scribed by Colpo, Pascal; Ernst, Roland; Rossi, F.

Book ID: 115472912
Publisher: American Institute of Physics
Year: 1999
Tongue: English
Weight: 352 KB
Volume: 85
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.369268

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