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Determination of the electron temperature in a planar inductive argon plasma with emission spectroscopy and electrostatic probe

โœ Scribed by Kang, Namjun; Oh, Soo-ghee; Ricard, Andre


Book ID
127138900
Publisher
Institute of Physics
Year
2008
Tongue
English
Weight
172 KB
Volume
41
Category
Article
ISSN
0022-3727

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