Determination of the Ion Sputtering-indu
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Konkol, A.; Menyhard, M.
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Article
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1997
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John Wiley and Sons
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English
⚖ 243 KB
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Elastic peak depth proÐling was carried out on an Mo/Si multilayer system using a rotating specimen, grazing angle of incidence (86Ä with respect to the surface normal) and 0.5 keV Ar ion energy. The depth proÐling was simulated by dynamic TRIM (T-DYN) code. The T-DYN code provided the in-depth dist