Determination of the composition of thin film compounds using an electron-probe x-ray microanalyzer. Analyzes of nitride films: A Itoh et al, J Vac Soc Japan, 13 (12), 1970, 413–420 (in Japanese).

• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 153 KB
• Volume: 21
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(71)91701-5