Determination of the composition of thin film compounds using an electron-probe X-ray microanalyzer. Analyzes of nitride films : A. Itoh et al. J. Vac. Soc. Japan 13 (12) (1970), p. 413, (In Japanese)

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 221 KB
• Volume: 11
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(72)90548-3