Determination of stress in films on single crystalline silicon substrates : R. Glang, R. W. Holmwood and R. L. Rosenfeld, Rev. Scient. Instrum.36, No. 1, January 7–10 (1965)

• Book ID: 113190356
• Publisher: Elsevier Science
• Year: 1966
• Tongue: English
• Weight: 99 KB
• Volume: 5
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(66)90112-0