374. Determination of stress in films on single crystalline silicon substrates: R Glang et al, Rev Sci Instrum, 36 (1), 1965, 7–9

• Book ID: 103447480
• Publisher: Elsevier Science
• Year: 1965
• Tongue: English
• Weight: 129 KB
• Volume: 15
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(65)91409-0