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Determination of energy dependent ionization probabilities of sputtered particles

✍ Scribed by P. Mazarov; A.V. Samartsev; A. Wucher

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 127 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.02.071

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