Probability of ionization of sputtered particles as a function of their energy: Part I: Negative Si− ions

Ionization probability of sputtered part

Ionization probability of sputtered particles as a function of their energy: Part II. Positive Si+ ions

✍ Y. Kudriavtsev; S. Gallardo; A. Villegas; G. Ramirez; R. Asomoza 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 480 KB

In this paper we represent the experimental ionization probability of sputtered silicon atoms as a function of their energy, which has been obtained for positive Si + ions sputtered from silicon by O 2 + ion beam. To explain the experimental data, we have considered ionization of an outgoing atom at