Determination of carbon impurities in epitaxial layers from semiconductor silicon by means of charged particles

✍ Scribed by M. L. Böttger; D. Birnstein; W. Helbig

• Book ID: 112772191
• Publisher: Springer
• Year: 1980
• Tongue: English
• Weight: 196 KB
• Volume: 58
• Category: Article
• ISSN: 1588-2780
• DOI: 10.1007/bf02533786