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Determination of Ca-As bonding at the CaF2/GaAs interface

โœ Scribed by Y. Yamada; M. Oshima; S. Maeyama; T. Kawamura; T. Miyahara


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
308 KB
Volume
33-34
Category
Article
ISSN
0169-4332

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๐Ÿ“œ SIMILAR VOLUMES


On the segregation of Ca at SiO2/Si inte
โœ Deenapanray, Prakash N. K.; Petravic, Mladen ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 128 KB

Segregation of Ca in Si has been studied using SIMS and RBS. Pronounced Ca profile broadening is observed during SIMS measurements with oxygen ions under bombardment conditions, yielding the formation of a stoichiometric oxide layer at the surface. Additional profiling through the SiO 2 /Si interfac