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Determination of backscattering factor for quantitative Auger analysis

✍ Scribed by J. Palczyński; W. Doliński; S. Mróz


Publisher
Elsevier Science
Year
1990
Weight
87 KB
Volume
247
Category
Article
ISSN
0167-2584

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Backscattering Factor for KLL Auger Yiel
✍ Lee, C. L.; Kong, K. Y.; Gong, H.; Ong, C. K. 📂 Article 📅 1996 🏛 John Wiley and Sons 🌐 English ⚖ 701 KB

Backscattering factor (R) between primary energies of 2-40 keV for film-substrate KLL Auger backscattering yield (R,) is calculated via Monte Carlo simulation for C and Al films. Substrates ranging from Be (Z = 4.0) to Au (Z = 79.0) are used in the study. Results via a normalized R, (RN) function sh