Backscattering correction for quantitative auger analysis : II. Verifications of the backscattering factors through quantification by AES

✍ Scribed by S. Ichimura; R. Shimizu; T. Ikuta

• Publisher: Elsevier Science
• Year: 1982
• Weight: 99 KB
• Volume: 115
• Category: Article
• ISSN: 0167-2584
• DOI: 10.1016/0167-2584(82)90298-5