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Detailed measurements of differential sputtering yields by ion-beam bombardment using laser fluorescence spectroscopy

โœ Scribed by Y. Matsuda; S. Matsubaguchi; C. Honda; M. Maeda; T. Okada; Y. Yamamura; K. Muraoka; M. Akazaki


Book ID
107810096
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
363 KB
Volume
145-147
Category
Article
ISSN
0022-3115

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