Desorption in light-induced dry etching of GaAs with Cl2 around 120 nm

✍ Scribed by B. Li; U. Streller; H.-P. Krause; I. Twesten; N. Schwentner; V. Stepanenko; Yu. Poltoratskii

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 376 KB
• Volume: 86
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(94)00465-x