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Designing of high-resolution photoresists: use of modern NMR techniques for evaluating lithographic performance

✍ Scribed by Debmalya Roy; P. K. Basu; P. Raghunathan; S. V. Eswaran

Book ID
110644485
Publisher
Springer-Verlag
Year
2004
Tongue
English
Weight
957 KB
Volume
27
Category
Article
ISSN
0250-4707

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✍ Robin K. Harris; Alan M. Kenwright; Kenneth J. Packer 📂 Article 📅 1985 🏛 John Wiley and Sons 🌐 English ⚖ 182 KB

## Abstract A modification to the well‐established non‐quaternary suppression pulse sequence used in high‐resolution solid‐state NMR is proposed which allows the inclusion of a ‘flip‐back’ pulse. The utility of such a sequence is demonstrated by spectra obtained using the standard and modified NQS