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Design of near-field holographic optical elements by grating matching

✍ Scribed by Pedersen, Henrik C. ;Thirstrup, Carsten

Book ID
115351266
Publisher
The Optical Society
Year
2004
Tongue
English
Weight
316 KB
Volume
43
Category
Article
ISSN
1559-128X

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This paper reports on processing methods used to produce phase masks for near field holographic writing of fibre gratings. The masks are produced using e-beam lithography (EBL) and reactive ion etching (RIE). We shall discuss the relations between grating parameters such as ridge duty cycle and groo