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Design of ion energy distributions by a broad beam ion source

✍ Scribed by Zeuner, Michael; Meichsner, Jürgen; Neumann, Horst; Scholze, Frank; Bigl, Frieder


Book ID
119967742
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
549 KB
Volume
80
Category
Article
ISSN
0021-8979

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