✦ LIBER ✦
High energy metal ion implantation using a novel, broad-beam, Marx-generator-based ion source “Magis”
✍ Scribed by André Anders; Ian G. Brown; Michael R. Dickinson; Robert A. MacGill
- Book ID
- 114169078
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 446 KB
- Volume
- 127-128
- Category
- Article
- ISSN
- 0168-583X
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