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Design of elastic components of nano- and microelectromechanical systems

โœ Scribed by E. M. Belozubov; V. A. Vasiliev; A. I. Zapevalin; P. S. Chernov

Publisher
Springer US
Year
2011
Tongue
English
Weight
112 KB
Volume
54
Category
Article
ISSN
0543-1972

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