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Design of bossed silicon membranes for high sensitivity microphone applications

โœ Scribed by P. Martins; S. Beclin; S. Brida; S. Metivet; O. Stojanovic; C. Malhaire


Book ID
106185245
Publisher
Springer-Verlag
Year
2007
Tongue
English
Weight
413 KB
Volume
13
Category
Article
ISSN
0946-7076

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