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Design of an aspheric mirror for synchrotron radiation X-ray lithography beamline

✍ Scribed by Jiabei Xiao; Franco Cerrina

Book ID: 107922841
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 438 KB
Volume: 347
Category: Article
ISSN: 0168-9002
DOI: 10.1016/0168-9002(94)91883-x

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