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Conceptual design of a synchrotron radiation source dedicated to X-ray lithography

✍ Scribed by M. Bassetti; E. Bernieri; E. Burattini; A. Cattoni; V. Chimenti; C. Sanelli; S. Tazzari; F. Tazzioli; C. Mencuccini; L. Palumbo; L. Picardi; R. Rinzivillo; Kang Shixiu

Book ID: 112899446
Publisher: Springer-Verlag
Year: 1991
Weight: 850 KB
Volume: 104
Category: Article
ISSN: 0369-3546
DOI: 10.1007/bf02812487

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