Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications

✍ Scribed by Andojo Ongkodjojo; Francis E. H. Tay; S. M. Ashok; S. Vicknesh; R. Akkipeddi

• Book ID: 106185327
• Publisher: Springer-Verlag
• Year: 2007
• Tongue: English
• Weight: 640 KB
• Volume: 14
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-007-0429-7