Micro-and nanoelectromechanical systems (MEMS/NEMS) have a high potential for mass sensing application. By miniaturization of the dimensions, higher and higher sensitivities can be achieved. Here we are presenting finite element modelling and optimization of a free-free beam type mechanical resonato
โฆ LIBER โฆ
Design and modeling of some sensing and actuating mechanisms for MEMS applications
โ Scribed by Shahriar Kouravand
- Book ID
- 108057208
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 633 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0307-904X
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