𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Design, fabrication, and characterization of deep-etched waveguide gratings

✍ Scribed by Kleckner, T.C.; Modotto, D.; Locatelli, A.; Mondia, J.P.; Linden, S.; Morandotti, R.; De Angelis, C.; Stanley, C.R.; van Driel, H.M.; Aitchison, J.S.

Book ID
115371524
Publisher
Optical Society of America
Year
2005
Tongue
English
Weight
415 KB
Volume
23
Category
Article
ISSN
0733-8724

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Characterization and fabrication of InGa
Characterization and fabrication of InGaAsP/InP deep-etched micro-waveguides
✍ A. Beaurain; S. Dupont; H. W. Li; J. P. Vilcot; C. Legrand; J. Harari; M. Consta πŸ“‚ Article πŸ“… 2003 πŸ› John Wiley and Sons 🌐 English βš– 160 KB

## Abstract InGaAsP/InP micro‐waveguides are fabricated by a deep (>3 ΞΌm) Reactive Ion Etching. The devices losses are measured by the Fabry–Perot technique for guide width contained between 10 ΞΌm and 0.5 ΞΌm. The measured losses range from 2 dB/mm to 14 dB/mm. Β© 2004 Wiley Periodicals, Inc. Microwa