Design and synthesis of an optimum performance crosslinking resist based on poly (2,4-dimethylstyrene)

✍ Scribed by P. Miller Tate; P. Heshmati; A. Brown; J. Wills

• Book ID: 110270985
• Publisher: Springer US
• Year: 1999
• Tongue: English
• Weight: 111 KB
• Volume: 10
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1023/a:1008956321727