✦ LIBER ✦
An aqueous-base developable photoresist based on light-induced cationic polymerization: Resist performance of poly(glycidyl methacrylate-co-methacrylic acid)
✍ Scribed by Kazuhiko Naitoh; Ken'ichi Koseki; Tsuguo Yamaoka
- Publisher
- John Wiley and Sons
- Year
- 1993
- Tongue
- English
- Weight
- 724 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0021-8995
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