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Design and spectroscopic reflectometry characterization of pulsed laser deposition combinatorial libraries

✍ Scribed by Peter K. Schenck; Nabil D. Bassim; Makoto Otani; Hiroyuki Oguchi; Martin L. Green


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
446 KB
Volume
254
Category
Article
ISSN
0169-4332

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Combinatorial Pulsed Laser Deposition of
✍ Jun Yamaguchi; Kenji Itaka; Tomohiro Hayakawa; Keiichiro Arai; Mitsugu Yamashiro πŸ“‚ Article πŸ“… 2004 πŸ› John Wiley and Sons 🌐 English βš– 151 KB

## Abstract **Summary:**Combinatorial pulsed laser deposition (PLD) technique has been applied to the fabrication of pentacene thin films for field effect devices. The pentacene films were fabricated by PLD with the Nd:YAG laser wavelength, fluence and the substrate temperature as combinatorial par