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Combinatorial Pulsed Laser Deposition of Pentacene Films for Field Effect Devices

✍ Scribed by Jun Yamaguchi; Kenji Itaka; Tomohiro Hayakawa; Keiichiro Arai; Mitsugu Yamashiro; Seiichiro Yaginuma; Hideomi Koinuma

Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
151 KB
Volume
25
Category
Article
ISSN
1022-1336

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✦ Synopsis

Abstract

**Summary:**Combinatorial pulsed laser deposition (PLD) technique has been applied to the fabrication of pentacene thin films for field effect devices. The pentacene films were fabricated by PLD with the Nd:YAG laser wavelength, fluence and the substrate temperature as combinatorial parameters. From the IR and UV‐vis absorption spectra and electrical properties of the films, the laser wavelength and fluence have been elucidated to be factors dominating the properties of the film.

Schematic diagram of a combinatorial pulsed laser deposition (PLD) system.

magnified imageSchematic diagram of a combinatorial pulsed laser deposition (PLD) system.

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