Design and fabrication of MEMS thermoele
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Till Huesgen; Peter Woias; Norbert Kockmann
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Article
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2008
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Elsevier Science
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English
⚖ 808 KB
For MEMS devices with power consumption in the range of micro-watts, thermal energy harvesting becomes a viable candidate for power supply. This paper describes a multipurpose platform to fabricate thermoelectric generators in a combined surface and bulk micromachining process. The thermocouples are