Design and Performance Evaluation of a Pressure-Reducing Device for Aerosol Sampling from High-Purity Gases

✍ Scribed by Lee, Jae-Keun; Rubow, Kenneth L.; Pui, David Y. H.; Liu, Benjamin Y. H.

• Book ID: 127271836
• Publisher: Taylor and Francis Group
• Year: 1993
• Tongue: English
• Weight: 565 KB
• Volume: 19
• Category: Article
• ISSN: 0278-6826
• DOI: 10.1080/02786829308959631