Comparative Study of Pressure Reducers for Aerosol Sampling from High Purity Gases

✍ Scribed by Lee, Jae-Keun; Rubow, Kenneth L.; Pui, David Y. H.; Liu, Benjamin Y. H.

• Book ID: 115548103
• Publisher: Taylor and Francis Group
• Year: 1995
• Tongue: English
• Weight: 595 KB
• Volume: 23
• Category: Article
• ISSN: 0278-6826
• DOI: 10.1080/02786829508965331