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Design and optimization of microring resonators in biochemical sensing applications

โœ Scribed by Chung-Yen Chao; Guo, L.J.

Book ID
115371764
Publisher
Optical Society of America
Year
2006
Tongue
English
Weight
646 KB
Volume
24
Category
Article
ISSN
0733-8724

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Micro-and nanoelectromechanical systems (MEMS/NEMS) have a high potential for mass sensing application. By miniaturization of the dimensions, higher and higher sensitivities can be achieved. Here we are presenting finite element modelling and optimization of a free-free beam type mechanical resonato