✦ LIBER ✦
Design and optimization of parylene nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing
✍ Scribed by Qinglong Zheng; Yong Xu
- Book ID
- 106186106
- Publisher
- Springer-Verlag
- Year
- 2011
- Tongue
- English
- Weight
- 578 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0946-7076
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