Design and fabrication of high sensitive microphone diaphragm using deep corrugation technique

✍ Scribed by W. J. Wang; R. M. Lin; Y. Ren

• Book ID: 106184624
• Publisher: Springer-Verlag
• Year: 2004
• Tongue: English
• Weight: 288 KB
• Volume: 10
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-003-0322-y